Study of power devices architectures based on innovative SiC substrates

Defense of doctoral thesis by Ahmad ABBAS, for the  University  Grenoble Alpes, speciality  " NANO ELECTRONIC & NANO TECHNOLOGIES "

Keywords :
Power, SiC, devices, semiconductors, integration, TCAD

Abstract :
 LETI has been working on materials and power devices for many years (GaN on Si 200mm, for 650V power transistors for example). Backed by its expertise in materials, device integration and characterization, LETI also conducts studies on other WBG (Wide Band Gap) semiconductors, in particular Silicon Carbide (SiC). With an industrial specialist in substrates, LETI is developing breakthrough solutions for manufacturers of SiC-based power devices (on substrates with large diameters of 150mm and especially 200mm). Wishing to accompany and support these developments, the department's researchers specializing in power transistors have proposed technological pathways that use these substrates. The advantage of such integrations is twofold:

• a) The analysis of 'simple' structures (diodes, capacitors) via electrical characterizations (simple and advanced: DLTS, temperature I(V) measurements, etc.) coupled with modelling and simulations (TCAD in particular).
• b) The study of innovative architectures of more complex components (diodes MPS, JBS) taking advantage of the particular properties of these new substrates (like CMOS on FDSOI). These developments will take advantage of the device integration expertise and manufacturing tools (200mm) of LETI platforms.

The thesis will take place within the "SiC Device" team project, within LAPS (devices) and LCEF (electrical characterisation) laboratories of DCOS (in connection with LIFT for the substrates components, and the LSM for TCAD).

Jury members :

• Edwige BANO, UNIVERSITY PROFESSOR - Grenoble INP - UGA : Supervisor
• Rosine COQ GERMANICUS,  UNIVERSITY PROFESSOR- Université de Caen Normandie :  Rapporteur
• Pierre BROSSELARD, ASSISTANT PROFESSOR HDR - INSA Lyon : Rapporteur
• Nathalie LABAT, UNIVERSITY PROFESSOR - Université de Bordeaux  :  Examiner
• Julien PERNOT, UNIVERSITY PROFESSOR- Université Grenoble Alpes  :  Examiner
• Frédéric ALLIBERT, ENGINEER DOCTOR - SOITEC : Examiner