PhD Defense of Mayeul DURAND DE GEVIGNEY

« Conception and optimisation of a new laser Doppler darkfield inspection process for transparent substrates»
Friday, July 8th, 2016 at 10:00

We present in this thesis a new innovative solution for detecting defects in the range of 100nm (or a hundredth of a thousandth of a millimetre) on transparent surfaces while guarantying that these defects are in the front face of the wafer. To do so, we use a sensor used in fluidics which on top of the information of scattered power, uses the frequency information on each defect to guaranty that these are on the front surface. Any defect out of the probe volume will be seen, but won’t present the characteristic frequency and will therefore be filtered out.
We apply here this method to inspect transparent substrates for the semi-conductor industry, where the state of the art tools use methods that are either too slow, or won’t allow an unambiguous location of defects.

Members of jury :
•    Pierre BENECH - Supervisor
•    Renaud BACHELOT - Rapporteur
•    Thierry BOSCH - Rapporteur
•    Isabelle SCHANEN - Examiner


Thesis prepared in the laboratory : UMR 5130 - IMEP-LAHC  (Institut de Microélectronique, Electromagnétisme, Photonique – Laboratoire Hyperfréquences et Caractérisation) , supervised by  Pierre BENECH..
Date infos
Defense of a doctoral thesis of Mayeul DURAND DE GEVIGNEY, for the University Grenoble Alpes , speciality "OPTIC and  RADIOFREQUENCIES ", entitled:
Location infos
3 rue Parvis Louis Néel
38000 Grenoble