PhD Defense of Mayeul DURAND DE GEVIGNEY

We present in this thesis a new innovative solution for detecting defects in the range of 100nm (or a hundredth of a thousandth of a millimetre) on transparent surfaces while guarantying that these defects are in the front face of the wafer. To do so, we use a sensor used in fluidics which on top of the information of scattered power, uses the frequency information on each defect to guaranty that these are on the front surface. Any defect out of the probe volume will be seen, but won’t present the characteristic frequency and will therefore be filtered out.
We apply here this method to inspect transparent substrates for the semi-conductor industry, where the state of the art tools use methods that are either too slow, or won’t allow an unambiguous location of defects.

Members of jury :
•    Pierre BENECH - Supervisor
•    Renaud BACHELOT - Rapporteur
•    Thierry BOSCH - Rapporteur
•    Isabelle SCHANEN - Examiner